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Sputtering by Particle Bombardment I

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Cover of 'Sputtering by Particle Bombardment I'

Table of Contents

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    Book Overview
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    Chapter 6 Introduction and overview
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    Chapter 7 Sputtering by ion bombardment theoretical concepts
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    Chapter 8 Theoretical aspects of monocrystal sputtering
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    Chapter 9 Sputtering yield measurements
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    Chapter 10 Sputtering yields of single crystalline targets
Attention for Chapter 8: Theoretical aspects of monocrystal sputtering
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