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| Chapter title |
Technische Herstellung von Silizium und Galliumarsenid
|
|---|---|
| Chapter number | 2 |
| Book title |
Halbleitertechnologie
|
| Published by |
Vieweg+Teubner Verlag, January 1981
|
| DOI | 10.1007/978-3-322-94051-3_2 |
| Book ISBNs |
978-3-51-910054-6, 978-3-32-294051-3
|
| Authors |
W. Harth |