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Fundamentals of Air Cleaning Technology and Its Application in Cleanrooms

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Cover of 'Fundamentals of Air Cleaning Technology and Its Application in Cleanrooms'

Table of Contents

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    Book Overview
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    Chapter 1 Particle and Size Distribution
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    Chapter 2 Airborne Particles in Outdoor Air: Atmospheric Dust
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    Chapter 3 Filtration Mechanism of Fine Particle
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    Chapter 4 Characteristics of Air Filters
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    Chapter 5 Structural Design of HEPA Filter
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    Chapter 6 Movement of Indoor Fine Particle
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    Chapter 7 Classification of Air Cleanliness
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    Chapter 8 Principle of Cleanroom
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    Chapter 9 Theory of Biological Cleanroom
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    Chapter 10 Calculation Theory of Uniform Distribution in Cleanroom
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    Chapter 11 Calculation Theory of Nonuniform Distribution in Cleanroom
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    Chapter 12 Characteristics of Cleanroom
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    Chapter 13 Design Calculation of Cleanroom
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    Chapter 14 Local Clean Area
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    Chapter 15 Theory of Leakage Preventing Layer
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    Chapter 16 Sampling Theory
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    Chapter 17 Measurement and Evaluation
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    Chapter 18 Erratum
Attention for Chapter 6: Movement of Indoor Fine Particle
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