Improvement of MEMS Thermomechanical Actuation Efficiency by Focused Ion Beam-Induced Deposition
Article in Journal of Microelectromechanical Systems (March 2024)
The most recent citing publications are shown below. View all 7 publications that cite this research output on Dimensions.
Article in Journal of Microelectromechanical Systems (March 2024)
Article in Applied Surface Science (January 2024)
Article in Applied Physics A (February 2022)