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| Chapter title |
Werkstoffe und technologische Grundlagen
|
|---|---|
| Chapter number | 2 |
| Book title |
Mikrosystemtechnik
|
| Published by |
Vieweg+Teubner Verlag, January 2004
|
| DOI | 10.1007/978-3-322-84878-9_2 |
| Book ISBNs |
978-3-51-916256-8, 978-3-32-284878-9
|
| Authors |
Ulrich Mescheder, Mescheder, Ulrich |