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| Chapter title |
Vacuum Pumps
|
|---|---|
| Chapter number | 2 |
| Book title |
Vacuum Technology
|
| Published by |
Springer, Berlin, Heidelberg, January 2008
|
| DOI | 10.1007/978-3-540-74433-7_2 |
| Book ISBNs |
978-3-54-074432-0, 978-3-54-074433-7
|
| Authors |
Nagamitsu Yoshimura |