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Chapter title |
A Visual Inspection Method Based on Periodic Feature for Wheel Mark Defect on Wafer Backside
|
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Chapter number | 18 |
Book title |
Computer Analysis of Images and Patterns
|
Published by |
Springer, Cham, August 2017
|
DOI | 10.1007/978-3-319-64689-3_18 |
Book ISBNs |
978-3-31-964688-6, 978-3-31-964689-3
|
Authors |
YangSub Park, KilBum Kang, SeongSoo Kim |