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| Chapter title |
Erzeugung von Mikrostrukturen an Oberflächen und dünnen Schichten
|
|---|---|
| Chapter number | 7 |
| Book title |
Vakuumbeschichtung
|
| Published by |
Springer, Berlin, Heidelberg, January 1995
|
| DOI | 10.1007/978-3-642-57905-9_7 |
| Book ISBNs |
978-3-64-263398-0, 978-3-64-257905-9
|
| Authors |
U. Behringer |