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Chapter title |
Low g Inertial Sensor based on High Aspect Ratio MEMS
|
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Chapter number | 34 |
Book title |
Advanced Microsystems for Automotive Applications 2005
|
Published by |
Springer, Berlin, Heidelberg, January 2005
|
DOI | 10.1007/3-540-27463-4_34 |
Book ISBNs |
978-3-54-024410-3, 978-3-54-027463-6
|
Authors |
Matthieu Reze, Jonathan Hammond, Reze, Matthieu, Hammond, Jonathan |