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Chapter title |
Do Electronic Transitions Play a Role in Laser Etching? The Case of Cl 2 on Si(100)
|
---|---|
Chapter number | 18 |
Book title |
Desorption Induced by Electronic Transitions DIET IV
|
Published by |
Springer, Berlin, Heidelberg, January 1990
|
DOI | 10.1007/978-3-642-84145-3_18 |
Book ISBNs |
978-3-64-284147-7, 978-3-64-284145-3
|
Authors |
B. Bourguignon, J. Boulmer, J.-P. Budin, D. Débarre |