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Introduction to Micromechanisms and Microactuators

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Cover of 'Introduction to Micromechanisms and Microactuators'

Table of Contents

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    Book Overview
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    Chapter 1 Introduction
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    Chapter 2 Miniaturization and Microsystems
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    Chapter 3 Scaling Laws: Science of Miniaturization
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    Chapter 4 Micromechanisms
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    Chapter 5 Design of Micromechanisms
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    Chapter 6 Dynamics of Micromechanisms
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    Chapter 7 Microactuators
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    Chapter 8 Microfabrication and Futuristic Issues
Attention for Chapter 3: Scaling Laws: Science of Miniaturization
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