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Chapter title |
Characterization and Testing of a Double Axis Scanning Micromirror
|
---|---|
Chapter number | 69 |
Book title |
Sensors and Microsystems
|
Published by |
Springer, Dordrecht, January 2010
|
DOI | 10.1007/978-90-481-3606-3_69 |
Book ISBNs |
978-9-04-813605-6, 978-9-04-813606-3
|
Authors |
F. Battini, E. Volpi, E. Marchetti, T. Cecchini, F. Sechi, L. Fanucci, M. De Marinis, U. Hofmann, Battini, F., Volpi, E., Marchetti, E., Cecchini, T., Sechi, F., Fanucci, L., De Marinis, M., Hofmann, U. |