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Chapter title |
ULTRATHIN OXIDE FILMS FOR ADVANCED GATE DIELECTRICS APPLICATIONS CURRENT PROGRESS AND FUTURE CHALLENGES
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Chapter number | 21 |
Book title |
Defects in SiO 2 and Related Dielectrics: Science and Technology
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Published by |
Springer, Dordrecht, January 2000
|
DOI | 10.1007/978-94-010-0944-7_21 |
Book ISBNs |
978-0-7923-6686-7, 978-9-40-100944-7
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Authors |
E.P. Gusev, Gusev, E.P. |