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Advanced Mechatronics and MEMS Devices

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Cover of 'Advanced Mechatronics and MEMS Devices'

Table of Contents

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    Book Overview
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    Chapter 1 Experience from the Development of a Silicon-Based MEMS Six-DOF Force–Torque Sensor
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    Chapter 2 Piezoelectrically Actuated Robotic End-Effector with Strain Amplification Mechanisms
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    Chapter 3 Autocalibration of MEMS Accelerometers
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    Chapter 4 Miniaturization of Micromanipulation Tools
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    Chapter 5 Digital Microrobotics Using MEMS Technology
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    Chapter 6 Flexure-Based Parallel-Kinematics Stages for Passive Assembly of MEMS Optical Switches
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    Chapter 7 Micro-Tactile Sensors for In Vivo Measurements of Elasticity
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    Chapter 8 Devices and Techniques for Contact Microgripping
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    Chapter 9 A Wall-Climbing Robot with Biomimetic Adhesive Pedrail
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    Chapter 10 Development of Bioinspired Artificial Sensory Cilia
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    Chapter 11 Jumping Like an Insect: From Biomimetic Inspiration to a Jumping Minirobot Design
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    Chapter 12 Modeling and H ∞ PID Plus Feedforward Controller Design for an Electrohydraulic Actuator System
Attention for Chapter 1: Experience from the Development of a Silicon-Based MEMS Six-DOF Force–Torque Sensor
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