Carbide, Nitride and Boride Materials Synthesis and Processing
Springer Netherlands
Chapter title |
Plasma-Enhanced Chemical Vapor Deposition (PECVD)
|
---|---|
Chapter number | 23 |
Book title |
Carbide, Nitride and Boride Materials Synthesis and Processing
|
Published by |
Springer, Dordrecht, January 1997
|
DOI | 10.1007/978-94-009-0071-4_23 |
Book ISBNs |
978-9-40-106521-4, 978-9-40-090071-4
|
Authors |
Stevenx R. Droes, Toivo T. Kodas, Mark J. Hampden-Smith, Droes, Stevenx R., Kodas, Toivo T., Hampden-Smith, Mark J. |
Country | Count | As % |
---|---|---|
Unknown | 51 | 100% |
Readers by professional status | Count | As % |
---|---|---|
Student > Ph. D. Student | 11 | 22% |
Student > Master | 10 | 20% |
Researcher | 6 | 12% |
Student > Bachelor | 4 | 8% |
Student > Doctoral Student | 1 | 2% |
Other | 1 | 2% |
Unknown | 18 | 35% |
Readers by discipline | Count | As % |
---|---|---|
Engineering | 9 | 18% |
Physics and Astronomy | 8 | 16% |
Chemistry | 6 | 12% |
Materials Science | 6 | 12% |
Chemical Engineering | 3 | 6% |
Other | 1 | 2% |
Unknown | 18 | 35% |