↓ Skip to main content
What is this page? Embed badge

MEMS Materials and Processes Handbook

Overview of attention for book
Cover of 'MEMS Materials and Processes Handbook'

Table of Contents

  1. Altmetric Badge
    Book Overview
  2. Altmetric Badge
    Chapter 1 The MEMS Design Process
  3. Altmetric Badge
    Chapter 2 Additive Processes for Semiconductors and Dielectric Materials
  4. Altmetric Badge
    Chapter 3 Additive Processes for Metals
  5. Altmetric Badge
    Chapter 4 Additive Processes for Polymeric Materials
  6. Altmetric Badge
    Chapter 5 Additive Processes for Piezoelectric Materials: Piezoelectric MEMS
  7. Altmetric Badge
    Chapter 6 Materials and Processes in Shape Memory Alloy
  8. Altmetric Badge
    Chapter 7 Dry Etching for Micromachining Applications
  9. Altmetric Badge
    Chapter 8 MEMS Wet-Etch Processes and Procedures
  10. Altmetric Badge
    Chapter 9 MEMS Lithography and Micromachining Techniques
  11. Altmetric Badge
    Chapter 10 Doping Processes for MEMS
  12. Altmetric Badge
    Chapter 11 Wafer Bonding
  13. Altmetric Badge
    Chapter 12 MEMS Packaging Materials
  14. Altmetric Badge
    Chapter 13 Surface Treatment and Planarization
  15. Altmetric Badge
    Chapter 14 MEMS Process Integration
Attention for Chapter 8: MEMS Wet-Etch Processes and Procedures
Altmetric Badge

Citations

dimensions_citation
132 Dimensions

Readers on

mendeley
10 Mendeley
Summary Dimensions citations
So far, Dimensions has found 132 publications that cite this research output.

132

The most recent citing publications are shown below. View all 132 publications that cite this research output on Dimensions.

This page shows the most recent citations of this research output.

Click here to find out how to access more activity.

This page is provided by Altmetric.