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| Chapter title |
Range Distribution
|
|---|---|
| Chapter number | 3 |
| Book title |
Ion Implantation: Basics to Device Fabrication
|
| Published by |
Springer, Boston, MA, January 1995
|
| DOI | 10.1007/978-1-4615-2259-1_3 |
| Book ISBNs |
978-0-7923-9520-1, 978-1-4615-2259-1
|
| Authors |
Emanuele Rimini, Rimini, Emanuele |