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New Perspectives on Surface Passivation: Understanding the Si-Al2O3 Interface

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New Perspectives on Surface Passivation: Understanding the Si-Al2O3 Interface
Springer International Publishing

Table of Contents

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    Book Overview
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    Chapter 1 Introduction
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    Chapter 2 Surface Recombination Theory
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    Chapter 3 Al $$_2$$ 2 O $$_3$$ 3 Deposition and Characterisation
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    Chapter 4 Electrical Properties of the Si–Al $$_{2}$$ 2 O $$_{3}$$ 3 Interface
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    Chapter 5 Influence of Deposition Parameters
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    Chapter 6 Effect of Post-Deposition Thermal Processing
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    Chapter 7 Effect of Surface Dopant Concentration
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    Chapter 8 Effect of Surface Orientation and Morphology
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    Chapter 9 Relationship Between Al $$_{2}$$ O $$_{3}$$ Bulk and Interface Properties
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    Chapter 10 Conclusion
Attention for Chapter 9: Relationship Between Al $$_{2}$$ O $$_{3}$$ Bulk and Interface Properties
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