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Chapter title |
The Development and Application of UV Excimer Lamps in Nanofabrication
|
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Chapter number | 4 |
Book title |
Functionalized Nanoscale Materials, Devices and Systems
|
Published in |
ADS, January 2008
|
DOI | 10.1007/978-1-4020-8903-9_4 |
Book ISBNs |
978-1-4020-8902-2, 978-1-4020-8903-9
|
Authors |
I. I. Liaw, I. W. Boyd, Liaw, I. I., Boyd, I. W. |