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Physik der Halbleiterbauelemente

Overview of attention for book
Attention for Chapter 7: Halbleitertechnologie
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Chapter title
Halbleitertechnologie
Chapter number 7
Book title
Physik der Halbleiterbauelemente
Published by
Springer, Berlin, Heidelberg, January 2005
DOI 10.1007/3-540-26727-1_7
Book ISBNs
978-3-54-022316-0, 978-3-54-026727-0