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Piezoelectric MEMS Resonators

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Cover of 'Piezoelectric MEMS Resonators'

Table of Contents

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    Book Overview
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    Chapter 1 AlN Thin Film Processing and Basic Properties
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    Chapter 2 Lead Zirconate Titanate (PZT) for M/NEMS
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    Chapter 3 Gallium Nitride for M/NEMS
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    Chapter 4 Lithium Niobate for M/NEMS Resonators
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    Chapter 5 Quality Factor and Coupling in Piezoelectric MEMS Resonators
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    Chapter 6 Flexural Piezoelectric Resonators
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    Chapter 7 Laterally Vibrating Piezoelectric MEMS Resonators
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    Chapter 8 BAW Piezoelectric Resonators
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    Chapter 9 Shear Piezoelectric MEMS Resonators
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    Chapter 10 Temperature Compensation of Piezo-MEMS Resonators
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    Chapter 11 Computational Modeling Challenges
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    Chapter 12 Fabrication Process Flows for Implementation of Piezoelectric MEMS Resonators
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    Chapter 13 Reliability and Quality Assessment (Stability and Packages)
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    Chapter 14 Large Volume Testing and Calibration
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    Chapter 15 High Frequency Oscillators for Mobile Devices
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    Chapter 16 BAW Filters and Duplexers for Mobile Communication
Attention for Chapter 12: Fabrication Process Flows for Implementation of Piezoelectric MEMS Resonators
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