Effect of Si substrate conductivity on surface acoustic wave resonator
Article in Materials Express (July 2024)
Piezoelectric MEMS Resonators
Overview of attention for book
Table of Contents
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Altmetric BadgeBook Overview
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Altmetric BadgeChapter 1 AlN Thin Film Processing and Basic Properties
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Altmetric BadgeChapter 2 Lead Zirconate Titanate (PZT) for M/NEMS
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Altmetric BadgeChapter 3 Gallium Nitride for M/NEMS
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Altmetric BadgeChapter 4 Lithium Niobate for M/NEMS Resonators
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Altmetric BadgeChapter 5 Quality Factor and Coupling in Piezoelectric MEMS Resonators
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Altmetric BadgeChapter 6 Flexural Piezoelectric Resonators
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Altmetric BadgeChapter 7 Laterally Vibrating Piezoelectric MEMS Resonators
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Altmetric BadgeChapter 8 BAW Piezoelectric Resonators
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Altmetric BadgeChapter 9 Shear Piezoelectric MEMS Resonators
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Altmetric BadgeChapter 10 Temperature Compensation of Piezo-MEMS Resonators
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Altmetric BadgeChapter 11 Computational Modeling Challenges
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Altmetric BadgeChapter 12 Fabrication Process Flows for Implementation of Piezoelectric MEMS Resonators
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Altmetric BadgeChapter 13 Reliability and Quality Assessment (Stability and Packages)
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Altmetric BadgeChapter 14 Large Volume Testing and Calibration
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Altmetric BadgeChapter 15 High Frequency Oscillators for Mobile Devices
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Altmetric BadgeChapter 16 BAW Filters and Duplexers for Mobile Communication