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Optical Measurement of Surface Topography

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Cover of 'Optical Measurement of Surface Topography'

Table of Contents

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    Book Overview
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    Chapter 1 Introduction to Surface Texture Measurement
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    Chapter 2 Some Common Terms and Definitions
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    Chapter 3 Limitations of Optical 3D Sensors
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    Chapter 4 Calibration of Optical Surface Topography Measuring Instruments
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    Chapter 5 Chromatic Confocal Microscopy
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    Chapter 6 Point Autofocus Instruments
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    Chapter 7 Focus Variation Instruments
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    Chapter 8 Phase Shifting Interferometry
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    Chapter 9 Coherence Scanning Interferometry
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    Chapter 10 Digital Holographic Microscopy
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    Chapter 11 Imaging Confocal Microscopy
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    Chapter 12 Light Scattering Methods
Attention for Chapter 8: Phase Shifting Interferometry
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