Research on precision linear displacement measurement method based on closed loop phase-shift control of single alternating light field
Article in tm - Technisches Messen (April 2024)
The most recent citing publications are shown below. View all 78 publications that cite this research output on Dimensions.
Article in tm - Technisches Messen (April 2024)
Article in IEEE Transactions on Semiconductor Manufacturing (March 2024)
Article in Journal of Computational Electronics (February 2024)