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Chapter title |
Elektronenstrahl-Istpositionsgeber
|
---|---|
Chapter number | 46 |
Book title |
Mikroelektronik in Österreich
|
Published by |
Springer, Vienna, January 1985
|
DOI | 10.1007/978-3-7091-8821-7_46 |
Book ISBNs |
978-3-21-181893-0, 978-3-70-918821-7
|
Authors |
E. Benes, M. Gröschl, K. Lübke, N. Gurker, F. W. Thomas, G. Thorn, H. Ranke |