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Micro and Nanomanufacturing

Overview of attention for book
Cover of 'Micro and Nanomanufacturing'

Table of Contents

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    Book Overview
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    Chapter 1 Principles of Micro- and Nanofabrication
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    Chapter 2 Microfabrication Using X- ray Lithography
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    Chapter 3 Manufacturing High Aspect Ratio Microstructures
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    Chapter 4 Meso-Micromachining
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    Chapter 5 Mechanical Micromachining
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    Chapter 6 Microgrinding
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    Chapter 7 Diamond Microcutting Tools
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    Chapter 8 Laser Micro- and Nanofabrication
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    Chapter 9 Micromachining Using Pulsed Water Droplets
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    Chapter 10 Diamond Nanogrinding
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    Chapter 11 Nanomachining
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    Chapter 12 Micro-and Nanomanufacturing
Attention for Chapter 3: Manufacturing High Aspect Ratio Microstructures
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