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| Chapter title |
Silicon Properties
|
|---|---|
| Chapter number | 1 |
| Book title |
Silicon Devices and Process Integration
|
| Published by |
Springer, Boston, MA, January 2009
|
| DOI | 10.1007/978-0-387-69010-0_1 |
| Book ISBNs |
978-0-387-36798-9, 978-0-387-69010-0
|