Production Planning and Control for Semiconductor Wafer Fabrication Facilities

@tokyu351 関連するかもですが Wafer Fabrication教科書が上海交通大学と华中科技大学により 2018年に出版されてますね https://t.co/EDGkDulbUm "systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing"

=> Wafer Fabrication: Automatic Material Handling System, Jie Zhang, SJTU (上海交通大学), with 华中科技大学, 2018 https://t.co/snxC5LxIpx Production Planning and Control for Semiconductor Wafer Fabrication Facilities: Modeling, Analysis, and Systems, 2013 https://