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Metal-Dielectric Interfaces in Gigascale Electronics

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Cover of 'Metal-Dielectric Interfaces in Gigascale Electronics'

Table of Contents

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    Book Overview
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    Chapter 1 Introduction
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    Chapter 2 Metal–Dielectric Diffusion Processes: Fundamentals
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    Chapter 3 Experimental Techniques
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    Chapter 4 Al-Dielectric Interfaces
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    Chapter 5 Cu-Dielectric Interfaces
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    Chapter 6 Barrier Metal–Dielectric Interfaces
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    Chapter 7 Self-Forming Barriers
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    Chapter 8 Kinetics of Ion Drift
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    Chapter 9 Time-Dependent Dielectric Breakdown (TDDB) and Future Directions
Attention for Chapter 5: Cu-Dielectric Interfaces
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