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Chapter title |
Laser Induced Chemical Etching of Silicon with SF 6 Using a Copper Bromide Vapour Laser
|
---|---|
Chapter number | 41 |
Book title |
Pulsed Metal Vapour Lasers
|
Published by |
Springer, Dordrecht, January 1996
|
DOI | 10.1007/978-94-009-1669-2_41 |
Book ISBNs |
978-9-40-107247-2, 978-9-40-091669-2
|
Authors |
B. Ivanov, D. Philipov, V. Shanov, G. Peev, Ivanov, B., Philipov, D., Shanov, V., Peev, G. |