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Introduction to Nanoscale Science and Technology

Overview of attention for book
Attention for Chapter 17: Nanoelectromechanical Systems
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Chapter title
Nanoelectromechanical Systems
Chapter number 17
Book title
Introduction to Nanoscale Science and Technology
Published by
Springer, Boston, MA, January 2004
DOI 10.1007/1-4020-7757-2_17
Book ISBNs
978-1-4020-7720-3, 978-1-4020-7757-9
Authors

Stephane Evoy, Martin Duemling, Tushar Jaruhar