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Chapter title |
Nanoelectromechanical Systems
|
---|---|
Chapter number | 17 |
Book title |
Introduction to Nanoscale Science and Technology
|
Published by |
Springer, Boston, MA, January 2004
|
DOI | 10.1007/1-4020-7757-2_17 |
Book ISBNs |
978-1-4020-7720-3, 978-1-4020-7757-9
|
Authors |
Stephane Evoy, Martin Duemling, Tushar Jaruhar |