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Chapter title |
Surface Roughness Measurement of a Semi-Conductor Wafer Using Laser Scattering Technique
|
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Chapter number | 162 |
Book title |
Experimental Analysis of Nano and Engineering Materials and Structures
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Published by |
Springer, Dordrecht, January 2007
|
DOI | 10.1007/978-1-4020-6239-1_162 |
Book ISBNs |
978-1-4020-6238-4, 978-1-4020-6239-1
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Authors |
C. J. Tay, S. H. Wang, C. Quan, Tay, C. J., Wang, S. H., Quan, C. |