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| Chapter title |
Lithographie
|
|---|---|
| Chapter number | 4 |
| Book title |
Technologie hochintegrierter Schaltungen
|
| Published by |
Springer, Berlin, Heidelberg, January 1996
|
| DOI | 10.1007/978-3-642-61415-6_4 |
| Book ISBNs |
978-3-64-264832-8, 978-3-64-261415-6
|
| Authors |
Dietrich Widmann, Hermann Mader, Hans Friedrich |