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Chapter title |
Structural and Mechanical Properties of TiON Nanocomposite Films Deposited on Silicon by Pulsed Bias Arc Ion Plating
|
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Chapter number | 262 |
Book title |
Proceedings of the 8 th Pacific Rim International Congress on Advanced Materials and Processing
|
Published by |
Springer, Cham, January 2013
|
DOI | 10.1007/978-3-319-48764-9_262 |
Book ISBNs |
978-3-31-948586-7, 978-3-31-948764-9
|
Authors |
Min Zhang, Yuli Pan, Xiaogang Hu, Ye Huang, Guoqiang Lin, Chuang Dong, Zhang, Min, Pan, Yuli, Hu, Xiaogang, Huang, Ye, Lin, Guoqiang, Dong, Chuang |