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Multi-Wafer Rotating MEMS Machines

Overview of attention for book
Cover of 'Multi-Wafer Rotating MEMS Machines'

Table of Contents

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    Book Overview
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    Chapter 1 Introduction to PowerMEMS
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    Chapter 2 System Design Considerations and Device Overview
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    Chapter 3 Materials, Structures and Packaging
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    Chapter 4 Microengine Fabrication
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    Chapter 5 Fabrication of Microscale Rotating Magnetic Machines
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    Chapter 6 High-Speed Gas Bearings for Micro-Turbomachinery
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    Chapter 7 Thermofluidics and Turbomachinery
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    Chapter 8 Motors and Generators
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    Chapter 9 Microcombustors for Rotating Machinery
Attention for Chapter 3: Materials, Structures and Packaging
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