Advanced Microsystems for Automotive Applications 2003
Springer, Berlin, Heidelberg
Chapter title |
Processes for the Fabrication of Three Dimensional MEMS Structures
|
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Chapter number | 2 |
Book title |
Advanced Microsystems for Automotive Applications 2003
|
Published by |
Springer, Berlin, Heidelberg, January 2003
|
DOI | 10.1007/978-3-540-76988-0_2 |
Book ISBNs |
978-3-54-000597-1, 978-3-54-076988-0
|
Authors |
Ernst Obermeier |
Country | Count | As % |
---|---|---|
Unknown | 2 | 100% |
Readers by professional status | Count | As % |
---|---|---|
Student > Ph. D. Student | 1 | 50% |
Professor > Associate Professor | 1 | 50% |
Readers by discipline | Count | As % |
---|---|---|
Engineering | 2 | 100% |