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Chapter title |
A Study on the Effect of Air on the Dynamic Motion of a MEMS Device and Its Shape Optimization
|
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Chapter number | 55 |
Book title |
High Performance Computing
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Published by |
Springer, Berlin, Heidelberg, October 2000
|
DOI | 10.1007/3-540-39999-2_55 |
Book ISBNs |
978-3-54-041128-4, 978-3-54-039999-5
|
Authors |
Hidetoshi Kotera, Taku Hirasawa, Sasatoshi Senga, Susumu Shima |