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Mendeley readers
| Title |
Effects of Rapid Thermal Annealing and Different Oxidants on the Properties of LaxAlyO Nanolaminate Films Deposited by Atomic Layer Deposition
|
|---|---|
| Published in |
Discover Nano, March 2017
|
| DOI | 10.1186/s11671-017-1994-z |
| Pubmed ID | |
| Authors |
Chenxi Fei, Hongxia Liu, Xing Wang, Lu Zhao, Dongdong Zhao, Xingyao Feng |
| Abstract |
A comparative study of different sequences of two metal precursors [trimethylaluminum (TMA) and Tris(isopropylcyclopentadienyl) lanthanum (La((i)PrCp)3)] for atomic layer deposition (ALD) lanthanum aluminum oxide (LaxAlyO) films is carried out. The percentage compositions of C and N impurity of LaxAlyO films were investigated using in situ X-ray photoelectron spectroscopy (XPS). The effects of different oxidants on the physical and chemical properties and electrical characteristics of LaxAlyO films are studied before and after annealing. Preliminary testing results indicate that the impurity level of LaxAlyO films grown with different oxidants can be well controlled before and after annealing. Analysis indicates the rapid thermal annealing (RTA) and kinds of oxidants have significant effects on the equivalent oxide thickness (EOT), dielectric constant, electrical properties, and stability of LaxAlyO films. Additionally, the change of chemical bond types of rapid thermal annealing effects on the properties of LaxAlyO films are grown with different oxidants also investigated by XPS. |
Mendeley readers
The data shown below were compiled from readership statistics for 8 Mendeley readers of this research output. Click here to see the associated Mendeley record.
Geographical breakdown
| Country | Count | As % |
|---|---|---|
| Unknown | 8 | 100% |
Demographic breakdown
| Readers by professional status | Count | As % |
|---|---|---|
| Student > Ph. D. Student | 2 | 25% |
| Student > Master | 2 | 25% |
| Student > Bachelor | 1 | 13% |
| Student > Doctoral Student | 1 | 13% |
| Researcher | 1 | 13% |
| Other | 0 | 0% |
| Unknown | 1 | 13% |
| Readers by discipline | Count | As % |
|---|---|---|
| Physics and Astronomy | 2 | 25% |
| Materials Science | 2 | 25% |
| Engineering | 2 | 25% |
| Unknown | 2 | 25% |