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Chapter title |
The Development of Constructive-Technological Decisions on Creation of a Family of Microelectronic Elements on the «Silicon on Insulator» (SOI) Structures to Provide the Ability to Create Sensors of External Influences of a Various Functional Purpose
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Chapter number | 4 |
Book title |
Proceedings of the Scientific-Practical Conference "Research and Development - 2016"
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Published by |
Springer, Cham, January 2018
|
DOI | 10.1007/978-3-319-62870-7_4 |
Book ISBNs |
978-3-31-962869-1, 978-3-31-962870-7
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Authors |
M. I. Kakoulin, A. V. Leonov, A. A. Malykh, V. N. Mordkovich, A. B. Odnolko, M. I. Pavlyuk |