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Chapter title |
Photolithography and Photoresist
|
---|---|
Chapter number | 112 |
Book title |
Encyclopedia of Polymeric Nanomaterials
|
Published by |
Springer Berlin Heidelberg, January 2014
|
DOI | 10.1007/978-3-642-36199-9_112-1 |
Book ISBNs |
978-3-64-236199-9
|
Authors |
Hiroto Kudo |
Editors |
Shiro Kobayashi, Klaus Müllen |