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Chapter title |
Arsenic Ion-Implanted Silicon Thermometer
|
---|---|
Chapter number | 183 |
Book title |
Advances in Cryogenic Engineering
|
Published by |
Springer US
|
DOI | 10.1007/978-1-4613-0639-9_183 |
Book ISBNs |
978-1-4612-7904-4, 978-1-4613-0639-9
|
Authors |
Gang, Chen, Heijden, R. W., Waele, A. T. A. M., Gijsman, H. M., Es, C. M., Tielen, F. P. B. |