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Multilayer Integrated Film Bulk Acoustic Resonators

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Cover of 'Multilayer Integrated Film Bulk Acoustic Resonators'

Table of Contents

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    Book Overview
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    Chapter 1 Introduction
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    Chapter 2 Propagation of Acoustic Wave in Crystals
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    Chapter 3 The Theory of FBAR
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    Chapter 4 The Deposition and Etching of AlN Film
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    Chapter 5 The FBAR with Membrane Structure
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    Chapter 6 Solidly Mounted Acoustic Resonator
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    Chapter 7 The Applications of FBAR in RF Filters
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    Chapter 8 The FBAR Excited by Lateral Filed
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    Chapter 9 High Sensitive Sensors Based on FBAR
Attention for Chapter 3: The Theory of FBAR
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