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Chapter title |
Dependence of Stress on Deposition Conditions for Sputtered Copper Films onto Flexible Polyimide Substrates
|
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Chapter number | 9 |
Book title |
Metallized Plastics 1
|
Published by |
Springer, Boston, MA, January 1989
|
DOI | 10.1007/978-1-4899-0879-7_9 |
Book ISBNs |
978-1-4899-0881-0, 978-1-4899-0879-7
|
Authors |
A. Entenberg, V. Lindberg, L. Fendrock, Sang-ki Hong, T. S. Chen, R. S. Horwath |