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Chapter title |
Real-time Monitoring of a Pulsed Power for Reactive Magnetron Sputtering Using a LabVIEW System
|
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Chapter number | 74 |
Book title |
Proceedings of the 35th International MATADOR Conference
|
Published by |
Springer, London, January 2007
|
DOI | 10.1007/978-1-84628-988-0_74 |
Book ISBNs |
978-1-84628-987-3, 978-1-84628-988-0
|
Authors |
F. L. Wen, C. H. Wen, I. Hsu, H. S. Wu, H. J. Wen |