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Feedback Control of MEMS to Atoms

Overview of attention for book
Cover of 'Feedback Control of MEMS to Atoms'

Table of Contents

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    Book Overview
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    Chapter 1 Introduction
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    Chapter 2 Feedback Control of Particle Size Distribution in Nanoparticle Synthesis and Processing
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    Chapter 3 In Situ Optical Sensing and State Estimation for Control of Surface Processing
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    Chapter 4 Automated Tip-Based 2-D Mechanical Assembly of Micro/Nanoparticles
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    Chapter 5 Atomic Force Microscopy: Principles and Systems Viewpoint Enabled Methods
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    Chapter 6 Feedback Control of Optically Trapped Particles
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    Chapter 7 Position Control of MEMS
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    Chapter 8 Dissecting Tuned MEMS Vibratory Gyros
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    Chapter 9 Feedback Control of Microflows
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    Chapter 10 Problems in Control of Quantum Systems
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    Chapter 11 Common Threads and Technical Challenges in Controlling Micro- and Nanoscale Systems
Attention for Chapter 9: Feedback Control of Microflows
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