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Chapter title |
CVD of Si 3 N 4 and Its Composites
|
---|---|
Chapter number | 25 |
Book title |
Emergent Process Methods for High-Technology Ceramics
|
Published by |
Springer, Boston, MA, January 1984
|
DOI | 10.1007/978-1-4684-8205-8_25 |
Book ISBNs |
978-1-4684-8207-2, 978-1-4684-8205-8
|
Authors |
Toshio Hirai, Hirai, Toshio |