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Chapter title |
Achievement of Nanocrystalline Structures After Thermal Annealing Amorphous W-SI-N Sputtered Films
|
---|---|
Chapter number | 22 |
Book title |
Nanostructures: Synthesis, Functional Properties and Applications
|
Published by |
Springer, Dordrecht, January 2003
|
DOI | 10.1007/978-94-007-1019-1_22 |
Book ISBNs |
978-1-4020-1753-7, 978-9-40-071019-1
|
Authors |
A. Cavaleiro, P. Marques |