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Chapter title |
How to Implement New Technology on a Production Line: Via-Hole Drilling with KrF-Laser as an Example
|
---|---|
Chapter number | 28 |
Book title |
Excimer Lasers
|
Published by |
Springer, Dordrecht, January 1994
|
DOI | 10.1007/978-94-015-8104-2_28 |
Book ISBNs |
978-9-04-814395-5, 978-9-40-158104-2
|
Authors |
Friedrich Bachmann |