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Chapter title |
Reduction of Bubble-Induced Defect in Semiconductor Lithography Process
|
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Chapter number | 38 |
Book title |
Towards AI-Aided Invention and Innovation
|
Published by |
Springer, Cham, January 2023
|
DOI | 10.1007/978-3-031-42532-5_38 |
Book ISBNs |
978-3-03-142531-8, 978-3-03-142532-5
|
Authors |
Oh, Kyoung-Whan, Sasa, Takashi, Heo, Seok, Kim, Daejung, Kim, Ouiserg, Kim, Jung-Hyeon |