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Chapter title |
Ultraprecise Surface Processing by Etching with Laser-Induced Plasmas
|
---|---|
Chapter number | 18 |
Book title |
Ultrafast Laser Nanostructuring
|
Published by |
Springer, Cham, January 2023
|
DOI | 10.1007/978-3-031-14752-4_18 |
Book ISBNs |
978-3-03-114751-7, 978-3-03-114752-4
|
Authors |
Ehrhardt, Martin, Lorenz, Pierre, Zimmer, Klaus |